"Study of piezoelectric aluminum nitride thin film by RF magnetron sputtering."

Shih-Jeh Wu, Ting-Wai Shen (2005)

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DOI: 10.1109/ROBIO.2005.246308

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-24

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Shih-Jeh Wu, Ting-Wai Shen:
Study of piezoelectric aluminum nitride thin film by RF magnetron sputtering. ROBIO 2005: 444-449

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