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"MEMS accelerometer with two thin film piezoelectric read-out."

Bohua Sun, Rui Zhang (2005)

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DOI: 10.1109/ROBIO.2005.246327

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-30

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Bohua Sun, Rui Zhang:
MEMS accelerometer with two thin film piezoelectric read-out. ROBIO 2005: 550-555

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