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"A direct-drive SCARA robot for wafer&ceramic-substrate handling based ..."
Yunbo He et al. (2017)
- Yunbo He, Chang Zhang, Wentao Ye, Zuoxiong He, Xin Chen, Jian Gao, Kai Zhang, Zhijun Yang, Xun Chen, Yun Chen, Hui Tang:
A direct-drive SCARA robot for wafer&ceramic-substrate handling based on visual servoing. CIS/RAM 2017: 428-433
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