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"A Bayesian indicator for Run-to-Run performance assessment in ..."

Taki Eddine Korabi et al. (2018)

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DOI: 10.1109/PRIME.2018.8430365

access: closed

type: Conference or Workshop Paper

metadata version: 2018-08-15

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  dblp key:
  - conf/prime/KorabiGAOP18
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Taki Eddine Korabi, Guillaume Graton, El Mostafa El Adel, Mustapha Ouladsine, Jacques Pinaton:
A Bayesian indicator for Run-to-Run performance assessment in semiconductor manufacturing. PRIME 2018: 53-56

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