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"Design, fabrication and characterization of a single-layer out-of-plane ..."

Yong-Sik Kim, Nicholas G. Dagalakis, Satyandra K. Gupta (2012)

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DOI: 10.1145/2393091.2393117

access: closed

type: Conference or Workshop Paper

metadata version: 2019-08-14

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  dblp key:
  - conf/permis/KimDG12
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Yong-Sik Kim, Nicholas G. Dagalakis, Satyandra K. Gupta:
Design, fabrication and characterization of a single-layer out-of-plane electrothermal actuator for a MEMS XYZ stage. PerMIS 2012: 122-128

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