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"High aspect ratio lateral electrode nano gap rectangular plate ..."

Srinivasa Reddy Kuppireddi, Oddvar Søråsen (2013)

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DOI: 10.1109/NORCHIP.2013.6701998

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-21

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  - conf/norchip/KuppireddiS13
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Srinivasa Reddy Kuppireddi, Oddvar Søråsen:
High aspect ratio lateral electrode nano gap rectangular plate micro-resonator novel process. NORCHIP 2013: 1-4

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