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"Design and fabrication of a micro-electromechanical system sandwich ..."

Xiaofeng Zhou et al. (2014)

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DOI: 10.1109/NEMS.2014.6908752

access: closed

type: Conference or Workshop Paper

metadata version: 2022-01-20

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  - conf/nems/ZhouLCLWW14
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Xiaofeng Zhou, Youling Lin, Lufeng Che, Xiaolin Li, Jian Wu, Yuelin Wang:
Design and fabrication of a micro-electromechanical system sandwich capacitive accelerometer. NEMS 2014: 28-31

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