"Design and optimization of parylee nanomechanical cantilevers with ..."

Qinglong Zheng, Zhuo Wang, Yong Xu (2009)

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DOI: 10.1109/NEMS.2009.5068616

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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  - https://dblp.org/rec/conf/nems/ZhengWX09
Qinglong Zheng, Zhuo Wang, Yong Xu:
Design and optimization of parylee nanomechanical cantilevers with integrated piezoresistors for surface-stress based biochemical sensing. NEMS 2009: 449-453

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