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"Silicon wafer modification by laser interference."

Le Zhao et al. (2013)

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DOI: 10.1109/NEMS.2013.6559942

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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  - conf/nems/ZhaoWWZYWMLY13
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  - https://dblp.org/rec/conf/nems/ZhaoWWZYWMLY13
Le Zhao, Zuobin Wang, Dapeng Wang, Ziang Zhang, Y. Yu, Zhankun Weng, Carsten Maple, Dayou Li, Yong Yue:
Silicon wafer modification by laser interference. NEMS 2013: 1236-1239

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