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"Micro-Raman spectroscopy analysis of residual stress in polysilicon MEMS ..."

Chenxu Zhao et al. (2013)

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DOI: 10.1109/NEMS.2013.6559795

access: closed

type: Conference or Workshop Paper

metadata version: 2021-03-08

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  - conf/nems/ZhaoLYL13
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Chenxu Zhao, Mengwei Li, Ming Yin, Zewen Liu:
Micro-Raman spectroscopy analysis of residual stress in polysilicon MEMS resonators. NEMS 2013: 570-573

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