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"Parylene C autofluorescence for on-chip highest processing temperature ..."

Lingqian Zhang et al. (2015)

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DOI: 10.1109/NEMS.2015.7147431

access: closed

type: Conference or Workshop Paper

metadata version: 2023-02-28

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  - conf/nems/ZhangLYWZL15
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Lingqian Zhang, Yaoping Liu, Fang Yang, Wei Wang, Dacheng Zhang, Zhihong Li:
Parylene C autofluorescence for on-chip highest processing temperature sensing. NEMS 2015: 302-305

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