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"Plasma half dicing based on micro-loading effect for ultra-thin LiNbO3 ..."

Yoshimi Yunoki et al. (2016)

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DOI: 10.1109/NEMS.2016.7758224

access: closed

type: Conference or Workshop Paper

metadata version: 2021-08-05

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  dblp key:
  - conf/nems/YunokiKMT16
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Yoshimi Yunoki, Michio Kadota, Masaaki Moriyama, Shuji Tanaka:
Plasma half dicing based on micro-loading effect for ultra-thin LiNbO3 plate wave devices on Si substrate. NEMS 2016: 168-171

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