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"Dual-bottom-electrode CMUT based on standard CMOS process."

Ting Yu, Xingqiang Lu, Fengqi Yu (2011)

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DOI: 10.1109/NEMS.2011.6017285

access: closed

type: Conference or Workshop Paper

metadata version: 2022-04-12

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  dblp key:
  - conf/nems/YuLY11
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Ting Yu, Xingqiang Lu, Fengqi Yu:
Dual-bottom-electrode CMUT based on standard CMOS process. NEMS 2011: 21-24

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