"A design of spring constant arranged for MEMS accelerometer by multi-layer ..."

Daisuke Yamane et al. (2016)

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DOI: 10.1109/NEMS.2016.7758281

access: closed

type: Conference or Workshop Paper

metadata version: 2021-09-23

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  - conf/nems/YamaneKSTSMM16
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  - https://dblp.org/rec/conf/nems/YamaneKSTSMM16
Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Kazuya Masu, Katsuyuki Machida:
A design of spring constant arranged for MEMS accelerometer by multi-layer metal technology. NEMS 2016: 419-422

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