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"Hybrid etching process and its application in thermopile infrared sensor."

Dehui Xu et al. (2010)

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DOI: 10.1109/NEMS.2010.5592424

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Dehui Xu, Bin Xiong, Yuelin Wang, Yinglei Ma:
Hybrid etching process and its application in thermopile infrared sensor. NEMS 2010: 425-428

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