"A Study on High Resolution Batch-Mode Micro-Utralsonic-Machining with ..."

Yanming Xia et al. (2018)

> Home

Details and statistics

DOI: 10.1109/NEMS.2018.8557003

access: closed

type: Conference or Workshop Paper

metadata version: 2021-08-06

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/nems/XiaWSLMLCWJ18
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/nems/XiaWSLMLCWJ18
Yanming Xia, Tao Wang, Lu Song, Xuanyanz Li, Shenglin Ma, Rongfeng Luo, Jing Chen, Wei Wang, Yufeng Jin:
A Study on High Resolution Batch-Mode Micro-Utralsonic-Machining with Constant Feed Force of Sapphire for MEMS Application. NEMS 2018: 304-307

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.