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"A digital prototype miniature silicon microgyroscope."

Dunzhu Xia, Xia Sheng, Shourong Wang (2010)

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DOI: 10.1109/NEMS.2010.5592425

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Dunzhu Xia, Xia Sheng, Shourong Wang:
A digital prototype miniature silicon microgyroscope. NEMS 2010: 429-432

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