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"Mass fabrication of 4H-SiC high temperature pressure sensors by ..."
Lukang Wang et al. (2021)
- Lukang Wang, You Zhao, Yulong Zhao, Yu Yang, Bo Li, Taobo Gong:
Mass fabrication of 4H-SiC high temperature pressure sensors by femtosecond laser etching. NEMS 2021: 1478-1481
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