"Realization of the microchannel with microisland arrays by one-step ..."

Yifan Wang, Zewen Liu (2015)

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DOI: 10.1109/NEMS.2015.7147491

access: closed

type: Conference or Workshop Paper

metadata version: 2021-03-08

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Yifan Wang, Zewen Liu:
Realization of the microchannel with microisland arrays by one-step silicon wet etching process. NEMS 2015: 557-560

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