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"Study on thermoelastic dissipation in bulk mode resonators with etch holes."

Cheng Tu, Joshua E.-Y. Lee (2012)

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DOI: 10.1109/NEMS.2012.6196821

access: closed

type: Conference or Workshop Paper

metadata version: 2019-10-19

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Cheng Tu, Joshua E.-Y. Lee:
Study on thermoelastic dissipation in bulk mode resonators with etch holes. NEMS 2012: 478-482

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