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"Fabrication and evaluation of silicon micromechanical resonator using ..."
Nguyen Van Toan et al. (2014)
- Nguyen Van Toan
, Tomohiro Kubota, Halubai Seknar, Seiji Samukawa
, Takahito Ono
:
Fabrication and evaluation of silicon micromechanical resonator using neutral beam etching technology. NEMS 2014: 1-5
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