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"A Novel Piezoresistive Transducer for Bulk Mode MEMS Resonator."
Yupeng Tian, Haoshen Zhu, Quan Xue (2022)
- Yupeng Tian, Haoshen Zhu, Quan Xue:
A Novel Piezoresistive Transducer for Bulk Mode MEMS Resonator. NEMS 2022: 235-238
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