"Fabrication of membrane-typed metal mould with microstructures and ..."

Yu-Hsiang Tang et al. (2013)

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DOI: 10.1109/NEMS.2013.6559684

access: closed

type: Conference or Workshop Paper

metadata version: 2020-09-14

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Yu-Hsiang Tang, Yu-Hsin Lin, Jr-Jung Yang, Ming-Hua Shiao:
Fabrication of membrane-typed metal mould with microstructures and application for roller imprinting. NEMS 2013: 68-71

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