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"A new process for thermally stable CMOS MEMS capacitive sensors."
Siew-Seong Tan et al. (2011)
- Siew-Seong Tan, Cheng-Yen Liu, Li-Ken Yeh, Yi-Hsiang Chiu, Klaus Y. J. Hsu:
A new process for thermally stable CMOS MEMS capacitive sensors. NEMS 2011: 329-332
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