![](https://dblp1.uni-trier.de/img/logo.ua.320x120.png)
![](https://dblp1.uni-trier.de/img/dropdown.dark.16x16.png)
![](https://dblp1.uni-trier.de/img/peace.dark.16x16.png)
Остановите войну!
for scientists:
![search dblp search dblp](https://dblp1.uni-trier.de/img/search.dark.16x16.png)
![search dblp](https://dblp1.uni-trier.de/img/search.dark.16x16.png)
default search action
"Fabrication and characterization of lithium-niobate thin film MEMS ..."
Wei-Siang Tan et al. (2016)
- Wei-Siang Tan, Grace W. Fang, Gayathri Pillai, Cheng-Chi Chen, Chao-Yu Chen, Chi-Hang Chin, Sheng-Shian Li
:
Fabrication and characterization of lithium-niobate thin film MEMS piezoelectric resonators. NEMS 2016: 516-519
![](https://dblp1.uni-trier.de/img/cog.dark.24x24.png)
manage site settings
To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.