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"Fabrication of ring-shaped silicon resonator using (2, 1) in-plane ..."

Kenta Suzuki, Kumiko Ioka, Yasushiro Nishioka (2011)

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DOI: 10.1109/NEMS.2011.6017322

access: closed

type: Conference or Workshop Paper

metadata version: 2020-08-07

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  - conf/nems/SuzukiIN11
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Kenta Suzuki, Kumiko Ioka, Yasushiro Nishioka:
Fabrication of ring-shaped silicon resonator using (2, 1) in-plane resonance mode. NEMS 2011: 170-173

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