"A new experimental methodology using point deflection to quantify residual ..."

Sofiane Soulimane et al. (2013)

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DOI: 10.1109/NEMS.2013.6559776

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-02

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Sofiane Soulimane, Arnaud Pouydebasque, Sébastien Bolis, Fabrice Jacquet, Claudine Bridoux, Florian Dupont, Christophe Poulain, Stéphane Moreau, Stephane Fanget:
A new experimental methodology using point deflection to quantify residual stress of thin polymer membrane materials in MEMS devices. NEMS 2013: 486-489

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