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"Verification and test system technology for CMOS-MEMS switches."

Liu Peng et al. (2015)

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DOI: 10.1109/NEMS.2015.7147497

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Liu Peng, Wenzhong Lou, Ximing Dai, Yufei Lu:
Verification and test system technology for CMOS-MEMS switches. NEMS 2015: 585-588

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