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"An advantageous fabrication technology to integrate pressure sensor into ..."

Cheng Pang et al. (2009)

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DOI: 10.1109/NEMS.2009.5068575

access: closed

type: Conference or Workshop Paper

metadata version: 2024-02-05

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  - https://dblp.org/rec/conf/nems/PangZZSDFL09
Cheng Pang, Zhan Zhao, Jiangang Zhang, Li Shi, Lidong Du, Zhen Fang, Yonghong Liu:
An advantageous fabrication technology to integrate pressure sensor into multi-sensor for micro weather station. NEMS 2009: 270-273

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