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"Comparative study of a high pressure sensor with rectangular diaphragm."

Zhe Niu et al. (2013)

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DOI: 10.1109/NEMS.2013.6559816

access: closed

type: Conference or Workshop Paper

metadata version: 2021-02-03

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  dblp key:
  - conf/nems/NiuZTG13
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Zhe Niu, Yulong Zhao, Bian Tian, Fangfang Guo:
Comparative study of a high pressure sensor with rectangular diaphragm. NEMS 2013: 661-664

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