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"A study on young's modulus of electroplated gold cantilevers for MEMS devices."
Hideaki Nakajima et al. (2017)
- Hideaki Nakajima, Tso-Fu Mark Chang
, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, Masato Sone
:
A study on young's modulus of electroplated gold cantilevers for MEMS devices. NEMS 2017: 264-267
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