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"Fabrication of two-point-supported annular-type microresonators with ..."

Sunao Murakami et al. (2011)

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DOI: 10.1109/NEMS.2011.6017452

access: closed

type: Conference or Workshop Paper

metadata version: 2019-12-13

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  - conf/nems/MurakamiKIMM11
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Sunao Murakami, Mitsuo Konno, Tsuyoshi Ikehara, Ryutaro Maeda, Takashi Mihara:
Fabrication of two-point-supported annular-type microresonators with capacitive transducer gaps. NEMS 2011: 707-710

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