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"An optimized fabrication of high yield CMOS-compatible silicon carbide ..."

B. Meng et al. (2012)

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DOI: 10.1109/NEMS.2012.6196876

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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B. Meng, W. Tang, Z. R. Wang, H. X. Zhang:
An optimized fabrication of high yield CMOS-compatible silicon carbide capacitive pressure sensors. NEMS 2012: 721-724

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