"Characterization of a multi-layered MEMS pressure sensor using ..."

Liang Lou et al. (2012)

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DOI: 10.1109/NEMS.2012.6196732

access: closed

type: Conference or Workshop Paper

metadata version: 2020-10-25

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Liang Lou, Songsong Zhang, Woo-Tae Park, Lishiah Lim, Dim-Lee Kwong, Chengkuo Lee:
Characterization of a multi-layered MEMS pressure sensor using piezoresistive silicon nanowire within large measurable strain range. NEMS 2012: 99-103

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