"A surface micromachining process utilizing dual metal sacrificial layer ..."

Bo Liu et al. (2010)

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DOI: 10.1109/NEMS.2010.5592479

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-02

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Bo Liu, Zhiqiu Lv, Zhihong Li, Xunjun He, Yilong Hao:
A surface micromachining process utilizing dual metal sacrificial layer for fabrication of RF MEMS switch. NEMS 2010: 620-623

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