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"Preparation, Characterization, Insulation Study of Al2O3 Thin Film ..."

Xingkai Lin et al. (2018)

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DOI: 10.1109/NEMS.2018.8556912

access: closed

type: Conference or Workshop Paper

metadata version: 2021-08-06

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  dblp key:
  - conf/nems/LinWDZ18
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Xingkai Lin, Yanlei Wang, Guifu Ding, Congchun Zhang:
Preparation, Characterization, Insulation Study of Al2O3 Thin Film Deposited by Dual Ion Beam Sputtering. NEMS 2018: 115-118

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