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"The study of compensative structure assisted convex and concave corner ..."

Yu-Hsin Lin et al. (2015)

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DOI: 10.1109/NEMS.2015.7147475

access: closed

type: Conference or Workshop Paper

metadata version: 2020-09-14

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  dblp key:
  - conf/nems/LinCCHTCYHH15
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  - https://dblp.org/rec/conf/nems/LinCCHTCYHH15
Yu-Hsin Lin, Yuan-Chieh Cheng, Nien-Nan Chu, Wensyang Hsu, Yu-Hsiang Tang, Po-Li Chen, Chih-Chung Yang, Ming-Hua Hsiao, Chien-Nan Hsiao:
The study of compensative structure assisted convex and concave corner structures etching by inductively coupled plasma-reactive ion etch (ICP-RIE). NEMS 2015: 491-493

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