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"Symmetric toggle structured MEMS linear variable capacitor with large ..."

Ling Li et al. (2013)

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DOI: 10.1109/NEMS.2013.6559948

access: closed

type: Conference or Workshop Paper

metadata version: 2021-03-08

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Ling Li, Chenxu Zhao, Mengwei Li, Zewen Liu:
Symmetric toggle structured MEMS linear variable capacitor with large tunning ratio. NEMS 2013: 1266-1269

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