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"Design and fabrication of a high fill-factor micro-mirror array."

Sihua Li, Jing Xu, Yaming Wu (2010)

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DOI: 10.1109/NEMS.2010.5592576

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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  - conf/nems/LiXW10
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Sihua Li, Jing Xu, Yaming Wu:
Design and fabrication of a high fill-factor micro-mirror array. NEMS 2010: 1048-1051

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