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"Impact of Aperture on the Performance of AlN Lamb Wave Resonators on SOI ..."
Zhihao Li, Yunping Niu, Hao Ren (2022)
- Zhihao Li, Yunping Niu, Hao Ren:
Impact of Aperture on the Performance of AlN Lamb Wave Resonators on SOI substrate. NEMS 2022: 330-333
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