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"Highly Sensitive AIN Surface Acoustic Wave Humidity Sensor Based on ..."

Xianhao Le et al. (2018)

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DOI: 10.1109/NEMS.2018.8557001

access: closed

type: Conference or Workshop Paper

metadata version: 2023-02-25

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Xianhao Le, Jintao Pang, Xuying Chen, Dongsheng Li, Zhen Xu, Chao Gao, Jin Xie:
Highly Sensitive AIN Surface Acoustic Wave Humidity Sensor Based on Uniform Graphene Oxide Thin Film Formed by Surface Tension. NEMS 2018: 173-176

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