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"In situ study of thermal deformation of metal resistive heater on silicon ..."

Yiu Wai Lai, Joshua E.-Y. Lee (2012)

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DOI: 10.1109/NEMS.2012.6196837

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Yiu Wai Lai, Joshua E.-Y. Lee:
In situ study of thermal deformation of metal resistive heater on silicon nitride membrane by digital holographic microscopy. NEMS 2012: 557-561

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