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"Characterization of line edge roughness and line width roughness of ..."
Zhuangde Jiang et al. (2009)
- Zhuangde Jiang, Fengxia Zhao, Weixuan Jing, Philip D. Prewett, Kyle Jiang:
Characterization of line edge roughness and line width roughness of nano-scale typical structures. NEMS 2009: 299-303
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