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"Development of fully MEMS-compatible process on the flexible substrate."

Po-Wei Huang, Kuo-Yung Hung, Yun-Ju Chuang (2017)

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DOI: 10.1109/NEMS.2017.8017025

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-14

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  dblp key:
  - conf/nems/HuangHC17
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Po-Wei Huang, Kuo-Yung Hung, Yun-Ju Chuang:
Development of fully MEMS-compatible process on the flexible substrate. NEMS 2017: 283-286

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