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"Mechanical strength measurement of micro anchor-beam combined structure ..."

Jun He et al. (2014)

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DOI: 10.1109/NEMS.2014.6908876

access: closed

type: Conference or Workshop Paper

metadata version: 2021-09-09

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  - conf/nems/HeHZZYWZ14
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Jun He, Xian Huang, Li Zhang, Danqi Zhao, Fang Yang, Wei Wang, Dacheng Zhang:
Mechanical strength measurement of micro anchor-beam combined structure fabricated by silicon-on-glass process. NEMS 2014: 568-571

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