Stop the war!

Остановите войну!

for scientists:

default search action

combined dblp search
author search
venue search
publication search

ask others

"A High-Selectivity HNA Etching System for Bulk Micromachined Deep Holes ..."

Taotao Guan et al. (2018)

> Home

Details and statistics

DOI: 10.1109/NEMS.2018.8556953

access: closed

type: Conference or Workshop Paper

metadata version: 2023-02-28

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/nems/GuanY0LFCCYZWZ18
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/nems/GuanY0LFCCYZWZ18
Taotao Guan, Fang Yang, Wei Wang, Peng Liu, Zexin Fan, Leijian Cheng, Zikun Chen, Runze Yu, Qiancheng Zhao, Wei Wang, Dacheng Zhang:
A High-Selectivity HNA Etching System for Bulk Micromachined Deep Holes with High Roundness. NEMS 2018: 397-400

a service of

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.