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"Lorentz Force Magnetic Sensors Based on Piezoelectric Aluminum Nitride on ..."

Sagnik Ghosh, Joshua E.-Y. Lee (2018)

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DOI: 10.1109/NEMS.2018.8556900

access: closed

type: Conference or Workshop Paper

metadata version: 2021-08-06

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Sagnik Ghosh, Joshua E.-Y. Lee:
Lorentz Force Magnetic Sensors Based on Piezoelectric Aluminum Nitride on Silicon Micromechanical Resonators. NEMS 2018: 288-291

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