"Performance comparison of methods to evading notching effect for SOG ..."

Haitao Ding, Zhenchuan Yang, Guizhen Yan (2009)

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DOI: 10.1109/NEMS.2009.5068514

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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Haitao Ding, Zhenchuan Yang, Guizhen Yan:
Performance comparison of methods to evading notching effect for SOG structures in DRIE. NEMS 2009: 5-8

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