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"Influence of substrate bias on the resistivity and TCR of nanostructured ..."

Chen-Kuei Chung, Y. L. Chang, T. S. Chen (2009)

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DOI: 10.1109/NEMS.2009.5068640

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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  dblp key:
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  persistent URL:
  - https://dblp.org/rec/conf/nems/ChungCC09
Chen-Kuei Chung, Y. L. Chang, T. S. Chen:
Influence of substrate bias on the resistivity and TCR of nanostructured Ta-Si-N films. NEMS 2009: 551-554

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