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"Effect of Al thickness on the Al induced low temperature poly-si film ..."

Hsiao-Yeh Chu et al. (2009)

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DOI: 10.1109/NEMS.2009.5068662

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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  dblp key:
  - conf/nems/ChuWYHL09
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  persistent URL:
  - https://dblp.org/rec/conf/nems/ChuWYHL09
Hsiao-Yeh Chu, Ming-Hang Weng, Ru-Yuan Yang, Chien-Wei Huang, Chia-Hsing Li:
Effect of Al thickness on the Al induced low temperature poly-si film crystallization process. NEMS 2009: 641-644

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